Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response tuned and significantly enhanced. In this study, ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite silicon microcantilever. Using device, we demonstrate that polarisation improves of P(VDF-TrFE). To distinguish between linear quadratic electrostrictive effect, lock-in measurements were performed order separate characteristic frequency both electro-mechanical phenomena. This work shows potential for MEMS devices having controllable actuating sensing properties.